Multiple Probe Deep Sub-Micron Electrical Measurements Using Leading Edge Micro-Machined Scanning Probes

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2001, Pages 209-215

  Krieg, Kenneth ^a   Thomson, Douglas ^a,b   Bridges, Greg ^a,b  

^a MFI Technologies   (United States)

^b UNIVERSITY OF MANITOBA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

REAL-TIME ELECTRICAL SIGNAL MEASUREMENTS;

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; ELECTRIC SIGNAL SYSTEMS; FAILURE ANALYSIS; IMAGING TECHNIQUES; MICROELECTRONICS; MICROMACHINING; NETWORKS (CIRCUITS); OPTICAL MICROSCOPY; REAL TIME SYSTEMS;

INTEGRATED CIRCUITS;

EID: 1542270708     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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