SCOPUS 정보 검색 플랫폼

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2002, Pages 473-482

Conducting Atomic-Force Microscopy Investigations on Thin Silicon Gate Oxides: Influence of Tip Shape and Humidity

(4) Kremmer, S a Peissl S a Teichert, C a Kuchar, F a

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; ELECTRIC BREAKDOWN; ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTROSTATICS; GATES (TRANSISTOR); ULTRAHIGH VACUUM;

GATE OXIDES; SCANNING CAPACITANCE MICROSCOPY (SCM);

SILICA;

EID: 1542270278 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (5)

References (12)

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11
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- copyrigth © 1993-2001 Tera Analysis
- Student's QuickField (TM) 4.2T, Version 4.2.2.2, copyrigth © 1993-2001 Tera Analysis, www.quickfield.com
- Student's QuickField (TM) 4.2T, Version 4.2.2.2

12
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- Samples provided by Infineon Technologies AG Villach, Austria
- Samples provided by Infineon Technologies AG Villach, Austria.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.