Improvement of confocal microscope performance by shaped annular beam and heterodyne confocal techniques

Optik

Volumn 116, Issue 3, 2005, Pages 111-117

  Zhao, Weiqian ^a   Tan, Jiubin ^a   Qiu, Lirong ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Annular pupil filter technique; Binary optical shaping; Confocal microscope; Measurement range; Superresolution measurement

Indexed keywords

BESSEL FUNCTIONS; DETECTORS; FOURIER TRANSFORMS; IMAGING TECHNIQUES; LENSES; LIGHT SOURCES; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; OPTICAL RESOLVING POWER; OPTICAL SYSTEMS; REFLECTION; SURFACE ROUGHNESS;

ANNULAR PUPIL FILTER TECHNIQUE; BINARY OPTICAL SHAPING; CONFOCAL MICROSCOPES; MEASUREMENT RANGE; SUPERRESOLUTION MEASUREMENT;

HETERODYNING;

EID: 15344345712     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijleo.2004.12.007     Document Type: Article

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