Particle filters integrated inside a silicon wafer

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 138-141

  Venstra, W J ^a   Pham, N P ^b   Sarro, P M ^b   Van Eijk, J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Bulk micromachining; Pattern transfer; Spray coating

Indexed keywords

ANISOTROPY; ETCHING; MICROMACHINING; NITRIDES; NOZZLES; PHOTORESISTS; POLYMERIC MEMBRANES; POROSITY; SILICON WAFERS;

BULK MICROMACHINING; NITRIDE LAYERS; PATTERN TRANSFER; SPRAY COATING;

MICROELECTRONICS;

EID: 14944353079     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.019     Document Type: Conference Paper

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