Fabrication of crystalline membranes oriented in the (111) plane in a (100) silicon wafer

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 502-507

  Venstra, W J ^a   Sarro, P M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

111; Cantilever sensor; Filtration; Silicon cantilever; Silicon membrane

Indexed keywords

CHEMICAL SENSORS; CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; ETCHING; MASKS; SEMICONDUCTOR DEVICE MANUFACTURE;

CANTILEVER SENSORS;

SILICON WAFERS;

EID: 0038358320     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00107-2     Document Type: Conference Paper

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