Construction of a polymer skeleton that is cut in half by ionizing radiation

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 43, Issue 5, 2005, Pages 1068-1075

  Shimizu, Takashi ^a   Ichikawa, Tsuneki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Electron attachment; Living polymerization; Plasma etching; Radiation; Resist; Scission; Spatial resolution; Styrene

Indexed keywords

CARBOXYLIC ACIDS; CROSSLINKING; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; ESTERS; IONIZING RADIATION; LIVING POLYMERIZATION; MOLECULAR WEIGHT; PLASMA ETCHING; STYRENE; SYNTHESIS (CHEMICAL);

ELECTRON ATTACHMENT; RESIST; SCISSION; SPATIAL RESOLUTION;

POLYSTYRENES;

EID: 14644442322     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/pola.20585     Document Type: Article

References (25)

1. Tolfree, D. W. L. Rep Prog Phys 1998, 61, 313.
2. Melngaillis, J.;. Mondelli, A. A.; Berry III, I. L.; Mohondro, R. J. Vac Sci Technol 1998, 16, 927.
3. Wallraff, G. M.; Hinsberg, W. D. Chem Rev 1999, 99, 1801.
4. Ouano, A. C.; Carothers, J. A. In Structure-Solubility Relationship in Polymers; Harris, F. W.; Seymour, R. B., Eds.; Academic Press: New York, 1977; p 11.
5. Cerrina, F. J Phys. D: Appl Phys 2000, 33, R103.
6. Hatzakis, M. J Electrochem Soc 1969, 116, 1033.
7. Bowden, M. J. In Materials for Microlithography; ACS Symposium Series 266; American Chemical Society, 1984; p 39.
8. Reichmanis, E.; Thompson, L. F. Chem Rev 1989, 89, 1273.
9. Iwayanagi, T.; Ueno, T.; Nonogaki, S.; Itoh, H.; Willson, C. G. In Electronic and Photonic Applications of Polymers; ACS Advances in Chemistry Series 218; American Chemical Society, 1988; Chapter 3.
10. Bowden, M. J.; Thompson, L. F. J Appl Polym Sci 1973, 17, 3211.
11. Ichikawa, T.; Yoshida, H. J Polym Sci Part A: Polym Chem 1990, 28, 1185.
12. Yates, B. M.; Shiozaki, D. M. J Polym Sci Part B: Polym Phys 1991, 31, 1779.
13. Ichikawa, T.; Oyama, K.; Kondoh, T.; Yoshida, H. J Polym Sci Part A: Polym Chem 1994, 32, 2487.
14. Bignozzi, M. C.; Ober, C. K.; Nobvembre, A. J.; Knurek, C. Polym Bull 1999, 43, 93.
15. Ichikawa, T.; Ueda, H.; Koizumi, H. Chem Phys Lett 2002, 363, 13.
16. George, M. K.; Veregin, R. P. N.; Kazmainer, P. M.; Hamer, G. K. Trends Polym Sci 1994, 2, 66.
17. Hawker, C. J. Ace Chem Res 1997, 30, 373.
18. Sawamoto, M.; Kamigaito, M. Trends Polym Sci 1996, 4, 371.
19. Matyjaszewski, K.; Xia, J. Chem Rev 2001, 101, 2921.
20. Kamigaito, M.; Ando, T.; Sawamoto, M. Chem Rev 2001, 101, 3661.
21. Hawker, C. J.; Bosman, A. W.; Harth, E. Chem Rev 2001, 101, 3689.
22. Kakuchi, T.; Narumi, A.; Mutsuda, T.; Miura, Y.; Sugimoto, N.; Satoh, T.; Kaga, H. Macromolecules 2003, 36, 3914.
23. Moore, S.; Stupp, I. Macromolecules 1990, 23, 65.
24. Izumida, T.; Ichikawa, T.; Yoshida, H. J Phys Chem 1980, 84, 60.
25. Roder, M. In Radiation Chemistry of Hydrocarbons; Földiák, G.; Ed.; Elsevier: Amsterdam, 1981; Chapter 6.