Lithographic results of electron beam photoresists prepared by living free radical polymerization

Polymer Bulletin

Volumn 43, Issue 1, 1999, Pages 93-100

  Bignozzi, M Chiara ^a,b   Ober, Christopher K ^a   Novembre, Anthony J ^c   Knurek, Chester ^c  

^a Cornell University   (United States)

^b UNIVERSITY OF BOLOGNA   (Italy)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002745049     PISSN: 01700839     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002890050538     Document Type: Article

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