Molecular design for the position-selective scission of polymer skeleton by ionizing radiation

Chemical Physics Letters

Volumn 363, Issue 1-2, 2002, Pages 13-17

  Ichikawa, Tsuneki ^a   Ueda, Hohnen ^a   Koizumi, Hitoshi ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037009679     PISSN: 00092614     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2614(02)01173-9     Document Type: Article

References (16)

1. I. Haller, M. Hatzakis, R. Srinivasan, IBMJ, Res. Dev. 12 (1968) 251.
2. T. Ichikawa, H. Yoshida, J. Polym. Sci., Part A: Polym. Chem. 28 (1990) 1185.
3. B.M. Yates, D.M. Shiozaki, J. Polym. Sci., Part B: Polym. Phys. 31 (1991) 1779.
4. T. Ichikawa, K. Oyama, T. Kondoh, H. Yoshida, J. Polym. Sci., Part A: Polym. Chem. 32 (1994) 2487.
5. M.J. Bowden, in: Materials for Microlithography, ACS Symposium Series 266, American Chemical Society, 1984, p. 39.
6. E. Reichmanis, L.F. Thompson, Chem. Rev. 89 (1989) 1273.
7. T. Iwayanagi, T. Ueno, S. Nonogaki, H. Itoh, C.G. Willson, in: Electronic and Photonic Applications of Polymers, ACS Advances in Chemistry Series 218, American Chemical Society, 1988, Chapter 3.
8. M.J. Bouden, L.F. Thompson, J. Appl. Polym. Sci. 17 (1973) 3211.
9. M.C. Bignozzi, C.K. Ober, A.J. Nobvembre, C. Knurek, Polym. Bull. 43 (1999) 93.
10. For example P.D. Burrow, K. Aflatooni, J. Chem. Phys. 116 (2002) 5471.
11. A. Modelli, M. Venuti, F. Scagnolari, D. Jones, Chem. Phys. Lett. 346 (2001) 492.
12. S.G. Lias, J.E. Bartmess, J.F. Liebman, J.L. Holmes, R.D. Levin, W.G. Mallard, J. Phys. Chem. Ref. Data 17 (Suppl. 1) (1988).
13. T. Izumida, T. Ichikawa, H. Yoshida, J. Phys. Chem. 84 (1980) 60.
14. T. Shida, in: Electron Absorption Spectra of Radical Ions, Elsevier, Amsterdam, Tokyo, 1998, p. 85.
15. M. Ogasawara, M. Tanaka, H. Yoshida, J. Phys. Chem. 91 (1987) 937.
16. A.C. Ouano, J.A. Carothers, in: F.W. Harris, R.B. Seymour (Eds.), Structure-Solubility Relationship in Polymers, Academic Press, New York, 1977, p. 11.