Pressure/current characteristics of a magnetron cold cathode gauge

Vacuum

Volumn 78, Issue 1, 2005, Pages 13-17

  Vesel, A ^a   Mozetic, M ^a   Zumer, M ^a   Nemanic, V ^a   Zajec, B ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Cold cathode gauge; Inverted magnetron gauge; Magnetron gauge; Pressure measurement; Ultrahigh vacuum

Indexed keywords

ANODES; DESORPTION; ELECTRIC CURRENTS; MAGNETIC FIELD MEASUREMENT; NITROGEN; PRESSURE MEASUREMENT; VACUUM APPLICATIONS; X RAYS;

COLD CATHODE GAUGE; INVERTED-MAGNETRON GAUGE; MAGNETRON GAUGE; ULTRAHIGH VACCUM;

CATHODES;

EID: 14644414872     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.12.008     Document Type: Article

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