Discharge characteristics of a magnetron cell in ultrahigh vacuum

Vacuum

Volumn 67, Issue 3-4, 2002, Pages 629-633

  Vesel, Alenka ^a   Mozetic, Miran ^a  

^a Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

Author keywords

Cold cathode gauge; Discharge; Ion pump; Magnetron gauge; Ultrahigh Vacuum

Indexed keywords

ANODES; ELECTRIC FIELDS; ELECTRIC POTENTIAL; MAGNETIC FIELDS; MAGNETRONS; STAINLESS STEEL; ULTRAHIGH VACUUM;

MAGNETRON CELLS;

ELECTRIC DISCHARGES;

EID: 0037179765     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00253-1     Document Type: Conference Paper

References (27)

1. Jepsen R.L. Appl Phys. 32:1961;2619-2626.
2. Knauer W., Lutz M.A. Appl Phys Lett. 2:1963;109-111.
3. Lange W.J. J Vac Sci Technol. 7:1970;228-232.
4. Peacock R.N., Peacock N.T., Hauschulz D.S. J Vac Sci Technol. A9:1991;1978-1985.
5. Redhead P.A. Vacuum. 38:1988;901-906.
6. Schuurman W. Physica. 36:1967;136-160.
7. Conn G.K.T., Daglish H.N. Vacuum. 3:1953;24-34.
8. Beck A.H., Brisbane A.D. Vacuum. 2:1952;137-146.
9. Peacock R.N., Peacock N.T. J Vac Sci Technol. A6:1988;1141-1144.
10. Redhead P.A., Hobson J.P. Can J Phys. 36:1958;271-288.
11. Redhead P.A. Can J Phys. 37:1959;1260-1271.
12. Guo Hua S, Nozomu T, Toshihiro T, Tsuyoshi K, Hiroyuki K, Katsuji N, Hiroyuki M. US Patent 5.980.212, 1999.
13. Hall L.D. Rev Sci Instrum. 29:1958;367-370.
14. Okano T., Ohsaki A., Tuzi Y. J Vac Sci Technol. A2:1984;191-194.
15. Pierini M., Dolcino L. J Vac Sci Technol. A1:1983;140-142.
16. Rutherford S. US patent 6.004.104, 1999.
17. Suetsugu Y. J Vac Sci Technol. A12:1994;248-250.
18. Tom T., James B.D. J Vac Sci Technol. 6:1969;304-307.
19. Welch K.M. J Vac Sci Technol. 13:1976;498-502.
20. Hartwig H., Kouptsidis J.S. J Vac Sci Technol. 11:1974;1154-1159.
21. Pierini M. J Vac Sci Technol. A2:1984;195-197.
22. Hseuh H.C., Jiang W.S., Mapes M. J Vac Sci Technol. A12:1994;1722-1726.
23. Thomas S.R., Goerz D.A., Pickels W.L. J Vac Sci Technol. A4:1986;1736-1739.
24. Redhead P.A. Can J Phys. 36:1958;255-270.
25. Knauer W., Lutz M.A. Appl Phys Lett. 2:1963;109-111.
26. Vesel A. B.Sc. Thesis, Ljubljana, 1999.
27. Kieffer L.J., Dunn G.H. Rev Mod Phys. 38:1966;1-35.