Cold cathode gauges for ultrahigh vacuum measurements

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 740-746

  Kendall, B R F ^a   Drubetsky, E ^b  

^a Elvac Laboratories   (United States)

^b Televac Division   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000832645     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580813     Document Type: Article

References (22)

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