Compact wide-range cold-cathode gauges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1724-1729

  Kendall, B R F ^a   Drubetsky, E ^b  

^a Elvac Laboratories   (United States)

^b Televac Division   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DEGASSING; DESORPTION; ELECTROCHEMICAL ELECTRODES; IONIZATION OF GASES; MAGNETRONS;

ELECTRON-STIMULATED DESORPTION; IONIZATION GAUGES;

VACUUM GAGES;

EID: 0034228388     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582479     Document Type: Article

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