Ionization gauge errors at low pressures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 2041-2049

  Kendall, B R F ^a  

^a Elvac Laboratories   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND CURRENT; ELECTRON COLLECTORS; ELECTRON STIMULATED DESORPTION; HIGH TEMPERATURE; INVERTED MAGNETRONS; IONIZATION GAUGE; LONG TERM STABILITY; LOW PRESSURES; MAGNETRON GAUGE; NON-LINEARITY; PLASMA INSTABILITIES; REPRODUCIBILITIES; X-RAY EFFECTS;

DEGASSING; DESORPTION; ELECTROMAGNETIC FIELDS; ERRORS; IONIZATION; MAGNETIC FIELD EFFECTS; MAGNETRONS; PLASMA DIAGNOSTICS; SEALS; SURFACE CHEMISTRY;

GAGES;

EID: 0007021456     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581912     Document Type: Conference Paper

References (75)

1. P. A. Redhead, J. Vac. Sci. Technol. A 10, 2665 (1992).
2. N. T. Peacock, J. Vac. Sci. Technol. A 10, 2674 (1992).
3. A. R. Filippelli, J. Vac. Sci. Technol. A 5, 3234 (1987).
4. W. H. Hayward, R. L. Jepsen, and P. A. Redhead, Transactions of the Tenth Annual National Vacuum Symposium of the American Vacuum Society (Macmillan, New York, 1963), p. 228.
5. P. A. Redhead, J. P. Hobson, and E. Kornelsen, Physical Basis of Ultrahigh Vacuum (Chapman and Hall, London, 1968), pp. 304-307, 327-329.
6. N. W. Robinson, The Physical Principles of Ultrahigh Vacuum Systems and Equipment (Chapman and Hall, London, 1968), p. 20.
7. Z. Hulek, Vacuum 36, 509 (1986).
8. P. A. Redhead, J. Vac. Sci. Technol. A 12, 904 (1994).
9. P. A. Redhead, Vacuum 44, 559 (1993).
10. G. F. Weston, Vacuum 29, 277 (1979).
11. A. Roth, Vacuum Technology, 3rd ed. (North-Holland, Amsterdam, 1990), pp. 315-319.
12. J. L. de Segovia and C. S. Martin, Transactions of the Third International Vacuum Congress, Stuttgart, 1965 (Pergamon, New York, 1967), Vol. 2, p. 245.
13. A. van Oostrom, Transactions of the Eighth Vacuum Symposium and Second International Congress (Pergamon, Oxford, 1962), p. 443.
14. A. Berman, Total Pressure Measurements in Vacuum Technology (Academic, Orlando, 1985), pp. 168-169, 196-202.
15. E. V. Komelsen, Transactions of the Third International Vacuum Congress, Stuttgart, 1965 (Pergamon, New York, 1967), Vol. 1, p. 65.
16. G. Reich, Transactions of the Seventh National Vacuum Symposium of the American Vacuum Society (Pergamon, New York, 1961), p. 112.
17. P. A. Redhead, Transactions of the Seventh National Vacuum Symposium of the American Vacuum Society (Pergamon, New York, 1961), p. 108.
18. B. Angerth, G. Gomero, and H. Wahl, Vacuum 34, 749 (1984).
19. P. A. Redhead, J. Vac. Sci. Technol. 3, 173 (1966).
20. U. Beeck and G. Reich, J. Vac. Sci. Technol. 9, 126 (1972).
21. P. A. Redhead, Vacuum 44, 559 (1993).
22. H. J. Schuetze and F. Stork, Vakuum-Technik 11, 133 (1962)
23. J. Groszkowski, Proceedings of the Third International Vacuum Congress, Stuttgart, 1965 (Pergamon, New York, 1967), p. 241.
24. P. A. Redhead, J. Vac. Sci. Technol. 6, 348 (1969).
25. G. Comsa, J. Vac. Sci. Technol. 9, 117 (1972).
26. A. R. Filippelli, J. Vac. Sci. Technol. A 14, 2953 (1996).
27. D. G. Bills, J. Vac. Sci. Technol. A 12, 574 (1994).
28. P. C. Arnold et al, J. Vac. Sci. Technol. A 12, 580 (1994).
29. K. Jousten and P. Röhl, J. Vac. Sci. Technol. A 13, 2266 (1995).
30. J. P. Hobson and P. A. Redhead, Proceedings of the Fourth International Vacuum Congress (Institute of Physics and The Physical Society, London, 1968), p. 3.
31. J. L. de Segovia, Proceedings of the Fourth International Vacuum Congress (Institute of Physics and The Physical Society, London, 1968), p. 627.
32. P. A. Redhead, Vacuum 13, 253 (1963).
33. P. A. Redhead, J. Vac. Sci. Technol. A 5, 3215 (1987).
34. P. A. Redhead, Vacuum 48, 585 (1997).
35. T. E. Hartman, Rev. Sci. Instrum. 34, 1190 (1963).
36. W. C. Schuemann, J. L. de Segovia, and D. Alpert, Transactions of the Tenth National Vacuum Symposium of the American Vacuum Society (Macmillan, New York, 1963), p. 223.
37. T. S. Chou and Z. Q. Tang, J. Vac. Sci. Technol. A 4, 2280 (1986).
38. H. C. Hseuh and C. Lanni, J. Vac. Sci. Technol. A 5, 3244 (1987).
39. D. Lee, Rev. Sci. Instrum. 34, 816 (1963).
40. B. R. F. Kendall and E. Drubetsky, J. Vac. Sci. Technol. A 16, 1163 (1998).
41. J. R. Young, J. Vac. Sci. Technol. 3, 345 (1966).
42. K. Mukugi, H. Tsuchidate, and N. Oishi, Vacuum 44, 591 (1993).
43. F. Feakes and F. L. Torney, Jr., Transactions of the Tenth National Vacuum Symposium of the American Vacuum Society (Macmillan, New York, 1963), p. 257.
44. R. N. Peacock, N. T. Peacock, and D. S. Hauschulz, J. Vac. Sci. Technol. A 9, 1977 (1991).
45. B. R. F. Kendall and E. Drubetsky, J. Vac. Sci. Technol. A 15, 740 (1997).
46. G. Carter and J. H. Leek, Br. J. Appl. Phys. 10, 364 (1959).
47. B. Cobic, G. Carter, and J. H. Leek, Vacuum 11, 247 (1961).
48. P. J. Abbott and J. P. Looney, J. Vac. Sci. Technol. A 12, 2911 (1994).
49. J. P. Hobson and P. A. Redhead, Can. J. Phys. 36, 271 (1958).
50. E. Drubetsky, US Patent No. 5,568,053 (1996).
51. P. A. Redhead, Can. J. Phys. 37, 1260 (1959).
52. J. H. Leek, Pressure Measurement in Vacuum Systems (Institute of Physics, London, 1957).
53. W. J. Lange, J. H. Singleton, and D. P. Eriksen, J. Vac. Sci. Technol. 3, 338 (1966).
54. R. N. Peacock and N. T. Peacock, Vacuum 45, 1055 (1994).
55. H. Mennenga and W. Schaedler, Proceedings of the Fourth International Vacuum Congress, Manchester, England, 1968 (Adlard, Surrey), p. 656.
56. N. T. Peacock and R. N. Peacock, J. Vac. Sci. Technol. A 6, 1141 (1987).
57. N. T. Peacock and R. N. Peacock, J. Vac. Sci. Technol. A 8, 2806 (1990).
58. T. Sigmond, Vacuum 25, 239 (1975).
59. K. Diels and R. Jaeckel, Leybold Vacuum Handbook, First English edition (Pergamon, Oxford, 1966), p. 249.
60. T. W. Morrison and B. R. F. Kendall, J. Vac. Sci. Technol. A 4, 138 (1986).
61. F. Watanabe, Fourteenth International Vacuum Congress, Birmingham, September 1998.
62. J. H. Singleton, J. Vac. Sci. Technol. 4, 103 (1967).
63. F. A. Baker and L. A. Pétermann, J. Vac. Sci. Technol. 3, 285 (1966).
64. R. W. Lawson, Br. J. Appl. Phys. 18, 1763 (1967).
65. J. P. Hobson and J. W. Earnshaw, Can. J. Phys. 46, 2517 (1968).
66. J. P. Hobson and J. W. Eamshaw, Proceedings of the Fourth International Vacuum Congress, Manchester, England, 1968 (Adlard, Surrey), p. 619.
67. C R. Tilford (private communication, November 1998).
68. K. E. McCulloh and C. R. Tilford, J. Vac. Sci. Technol. 18, 994 (1981).
69. K. F. Poulter and C. M. Sutton, Vacuum 31, 147 (1981).
70. S. D. Wood and C R. Tilford, J. Vac. Sci. Technol. A 3, 542 (1985).
71. C. R. Tilford, J. Vac. Sci. Technol. A 3, 546 (1985).
72. C R. Tilford, A.-R. Filippelli, and P. J. Abbott, J. Vac. Sci. Technol. A 13, 485 (1995).
73. A. R. Filippelli and P. J. Abbott, J. Vac. Sci. Technol. A 13, 2582 (1995).
74. K. M. Welch, L. A. Smart, and R. J. Todd, J. Vac. Sci. Technol. A 14, 1288 (1996).
75. B. R. F. Kendall and E. Drubetsky, J. Vac. Sci. Technol. A 14, 1292 (1996).