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Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 714-720

Characterization of a hybrid PVD/PACVD system for the deposition of TiC/CaO nanocomposite films by OES and probe measurements

(5) Kulisch, Wilhelm a,b Colpo, P b Rossi, F b Shtansky, D V c Levashov, E A c

a UNIVERSITY OF KASSEL (Germany)

b JOINT RESEARCH CENTRE (Italy)

c NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS (Russian Federation)

Author keywords

Hybrid PVD PACVD system; Optical emission spectroscopy; TiC CaO nanocomposite films

Indexed keywords

COATINGS; DEPOSITION; ELECTRONS; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; IONS; LIME; OPTICAL SYSTEMS; PHYSICAL VAPOR DEPOSITION; PLASMAS; PLASTIC FILMS; THIN FILMS;

INDUCTIVELY COUPLED PLASMA (ICP) POWER; NANOCOMPOSITE FILMS; OPTICAL EMISSION SPECTROSCOPY (OES); PLASMA ACTIVATED CHEMICAL VAPOR DEPOSITION (PACVD);

TITANIUM CARBIDE;

FILM;

EID: 14644403696 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.07.006 Document Type: Article

Times cited : (17)

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