Coupling Between Surface Plasma Wave and Slow Waves Supported by an Anisotropic Conductor

IEEE Transactions on Plasma Science

Volumn 31, Issue 6 II, 2003, Pages 1325-1329

  Jain, Ashim P ^a   Parashar, Jetendra ^a  

^a SAMRAT ASHOK TECHNOLOGICAL INSTITUTE   (India)

Author keywords

Slow waves; Surface plasma waves

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC CONDUCTORS; ELECTRIC DISCHARGES; ETCHING; ION IMPLANTATION; MICROWAVES; PLASMAS; SPUTTERING; THIN FILMS; WAVE PROPAGATION;

RADIO FREQUENCY (RF); SLOW WAVES; SURFACE PLASMA WAVES (SPW);

PLASMA WAVES;

EID: 1442360951     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2003.821356     Document Type: Article

References (10)

1. N. Hershokowitz, "Role of plasma aided manufacturing in semiconductor fabrication," IEEE Trans. Plasma Sci., vol. 26, pp. 1610-1620, Dec. 1998.
2. A. Ganguli and R. D. Tarey, "Understanding plasma sources," Current Sci., vol. 83, pp. 279-290, 2002.
3. H. Conrads and M. Schmidt, "Plasma generation and plasma sources," Plasma Sources Sci. Technol., vol. 9, pp. 441-454, 2000.
4. L. Stenflo, "Theory of nonlinear plasma surface waves," Phys. Scr., vol. T63, pp. 59-62, 1996.
5. B. Bhat and V. K. Tripathi, "Nonlinear surface wave propagation over plasma and conductors," J.Appl. Phys., vol. 46, pp. 1141-1145, 1975.
6. C. S. Liu and V. K. Tripathi, "Excitation of surface plasma waves over metallic surfaces by lasers and electron beams," IEEE Trans. Plasma Sci., vol. 28, pp. 353-358. Apr. 2000.
7. T. J. Wu, W. J. Guan, C. M. Tsai, W. Y. Yeh, and C. S. Kou, "Experimental study of the plasma resonance in a planar surface wave plasma," Phys. Plasmas, vol. 8, pp. 3195-3198, 2001.
8. J. Kudela, T. Terebessy, I. Odrobina, and M. Kando, "T-junction tuning system for large area surface wave plasma sources," Appl. Phys. Lett., vol. 80, pp. 1132-1134, 2002.
9. H. Sugai, I. Ganashev, and M. Nagatsu, "High density flat plasma production based on surface waves," Plasma Sources Sci. Technol., vol. 7, pp. 192-205, 1998.
10. Y. M. Aliev, A. A. Frolov, G. Brondin, and L. Stenflo, "Total backward reflection of electromagnetic radiation due to resonant excitation of surface waves," Phys. Rev. E, Stat. Phys. Plasmas Fluids Relat. Interdiscip. Top., vol. 47, pp. 4623-4624, 1993.