Experimental study of the plasma resonance in a planar surface wave plasma

Physics of Plasmas

Volumn 8, Issue 7, 2001, Pages 3195-3198

  Wu, T J ^a   Guan, W J ^a   Tsai, C M ^a   Yeh, W Y ^a   Kou, C S ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035396510     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1379342     Document Type: Article

References (19)

1. Microwave Excited Plasma, edited by M. Moisan and J. Pelletier (Elsevier, Amsterdam, 1992).
2. Microwave Discharges: Fundamental and Applications, NATO Advanced Study Institute, Series B Physics Vol. 302, edited by C. M Ferreira and M. Moisan (Plenum, New York. 1993).
3. K. Komachi and S. Kobayashi, J. Microwave Power Electromagn. Energy 24, 140 (1989).
4. H. Sugai, I Ghanashev, and M. Nagatsu, Plasma Sources Sci. Technol. 7, 192 (1998).
5. T. J. Wu and C. S. Kou, Rev. Sci. Instrum. 70, 2331 (1999)
6. M. Zethoff and U. Kortshagen, J. Phys. D 25, 1574 (1992).
7. Yu. M. Aliev and A. V. Maximov, Phys. Rev E 51, 6091 (1995).
8. I. Peres, M. Fortin, and J. Margot, Phys. Plasmas 3, 1754 (1996).
9. S. Grosse, M. Georgieva-Grosse, I. Ghanashev, and M. Schluter, J. Electromagn. Waves Appl. 11, 609 (1997).
10. Yu. M. Aliev, V. Yu. Bychenkov, A. V. Maximov, and H. Schluter, Plasma Sources Sci. Technol. 1, 126 (1992).
11. H. Sugai, I. Ghanashev, and M. Nagatsu, Plasma Sources Sci. Technol. 7. 192 (1998).
12. E. Rauchle, J. Phys. IV, Pr7-99 (1998).
13. S. Grosse, Technologies Based on Wave and Beam Generated Plasmas, NATO Advanced Study Institute Series, Partnership Subseries 3 High Technology, edited by H. Schluter and A Shivarova (Kluwer, Amsterdam, 1999), p. 17.
14. I. Ghanashev, H. Sugai, S Morita, and N. Toyoda, Plasma Sources Sci. Technol. 8, 363 (1999).
15. F. F. Chen, in Plasma Diagnostic Technologies, edited by R. H. Huddle and S. L. Leonard (Academic, New York, 1965), Chap. 4.
16. M. J. Druyvesteyn, Z Phys. 64, 781 (1930)
17. I. D. Sudit and R. C Woods, J. Appl. Phys. 76, 4488 (1994).
18. N G. Denisov, Sov. Phys JETP 4, 544 (1957).
19. R L. Stenzel, A. Y. Wang, and H. C. Kim, Phys. Rev Lett. 32, 654 (1974).