Ion bombardment induced damage in silicon carbide studied by ion beam analytical methods

Materials Science Forum

Volumn 353-356, Issue , 2001, Pages 271-274

  Szilagyi E ^a   Khanh N Q ^b   Horvath Z E ^b   Lohner, T ^b   Battistig, G ^b   Zolnai, Z ^b   Kotai E ^a   Gyulai, J ^b  

^a WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; ELECTRON RESONANCE; ION BOMBARDMENT; ION IMPLANTATION; RADIATION DAMAGE; SPECTROMETRY; TRANSMISSION ELECTRON MICROSCOPY;

CARBON SUBLATTICE; CHANNELING;

SILICON CARBIDE;

EID: 14344268601     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/msf.353-356.271     Document Type: Article

References (12)

1. M.G. Grimaldi, L. Calcagno, P. Musumeci, N. Frangis, J. Van Landuyt: Appl. Phys. 81 (1997), p. 7181.
2. M.V. Rao, P. Griffith, O.W. Holland, G. Kelner, J.A. Freitas, Jr., D.S. Simons, P.H. Chi: J. Appl. Phys. 77 (1995), p. 2479.
3. T. Troffer, M. Schadt, T. Frank, H. Itoh, G. Pensl, J. Heindl, H.P. Strunk, M. Maier: Phys. Stat. Sol(a) 162 (1997), p. 277.
4. A. Hallén, A. Henry, P. Pellegrino, B.G. Svensson, D. Aberg: Materials Science and Engineering B 61-62 (1999), p. 378.
5. A. Heft, E. Wendler, J. Heindl, T. Bachmann, E. Glaser, H.P. Strunk, W. Wesch: Nuclear Instruments and Methods in Physics Research B 113 (1996), p. 239.
6. E. Valcheva, Paskova, I.G. Ivanov, R. Yakimova, Q. Wahab, S. Savage, N. Nordell, C.I. Harris, J. Vac. Sci. Tech. B: Microelectronics and Nanometer Structures 17 (1999), p. 1040.
7. I. Nashiyama, T. Nishijima, E. Sakuma, S. Yoshida, Nucl. Instr. Meth. in Phys. Res. B 33 (1988), p. 599.
8. N.Q. Khánh, Z. Zolnai, T. Lohner, L. Tóth, L. Dobos, J. Gyulai, Nucl. Instr. Meth. in Phys. Res. B 161-163 (2000), p. 424.
9. W. Fukarek, R.A. Yankov, W. Anwand, V. Heera, Nucl. Instr. Meth. in Phys. Res. B 142 (1998), p. 561.
10. F. Pászti, A. Manuaba, C. Hajdu, A.A. Melo, M.F. Da Silva, Nucl. Instr. Meth. in Phys. Res. B 47 (1990), p. 187.
11. E. Kótai, Nucl. Instr. Meth. in Phys. Res. B 85 (1994), p. 588.
12. E. Szilágyi, F. Pászti, G. Amsel, Nucl. Instr. Meth. in Phys. Res. B 100 (1995), p. 103.