Uncertainty analysis in surface micromachined force gauges: Convex model approach

Journal of Aerospace Engineering

Volumn 17, Issue 1, 2004, Pages 40-44

  Attoh Okine, Nii O ^a  

^a DUPONT COMPANY   (United States)

Author keywords

Material properties; Micromechanics; Models; Uncertainty analysis

Indexed keywords

BISTABLE MICRORELAY; MICROFORCE GAUGES; MICROGRIPPERS; STATIC DEFLECTIONS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; DEFLECTION (STRUCTURES); ETCHING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PROBABILITY DISTRIBUTIONS; REINFORCEMENT; STATISTICAL METHODS; STOCHASTIC CONTROL SYSTEMS; THIN FILMS; UNCERTAIN SYSTEMS;

MICROMACHINING;

EID: 13944251060     PISSN: 08931321     EISSN: None     Source Type: Journal    
DOI: 10.1061/(ASCE)0893-1321(2004)17:1(40)     Document Type: Article

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