An improved thick-film piezoelectric material by powder blending and enhanced processing parameters

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 1, 2005, Pages 10-16

  Torah, Russel ^a   Beeby, Steve P ^a   White, Neil M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; BALL MILLING; BLENDING; BOROSILICATE GLASS; ELECTROCHEMISTRY; ELECTRODES; LEAD ALLOYS; MATHEMATICAL MODELS; POLYMERS; STOICHIOMETRY; THERMAL EFFECTS; THICK FILMS; ZIRCONIA;

FIRING TEMPERATURE; PIEZOCERAMICS; PIEZOELECTRIC POWDERS; STANDARD DEVIATIONS;

PIEZOELECTRIC MATERIALS;

EID: 13844297621     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1397345     Document Type: Article

References (13)

1. H. Baudry, "Screen-printing piezoelectric devices," in Proc. 6th Eur. Microelec. Conf., 1987, pp. 456-463.
2. J. H. Yoo, J. H. Hong, and W. Cao, "Piezoelectric ceramic bimorph coupled to thin metal plate as cooling fan for electronic devices," Sens. Actuators A, vol. 79, pp. 8-12, 2000.
3. S. P. Beeby, J. N. Ross, and N. M. White, "Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors," J. Micromech. Microeng., vol. 10, pp. 322-328, 2000.
4. S. P. Beeby, A. Blackburn, and N. M. White, "Processing of PZT piezoelectric thick films on silicon for microelectromechanical systems," J. Micromech. Microeng., vol. 9, pp. 218-229, 1999.
5. P. Glynne-Jones, S. P. Beeby, P. Dargie, T. Papakostas, and N. M. White, "An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on silicon," Meas. Sci. Technol., vol. 11, pp. 526-531, 2000.
6. T. Papakostas, N. R. Harris, S. P. Beeby, and N. M. White, "Piezoelectric thick-film polymer pastes," in Eurosensors XII, pp. 461-464, 1998.
7. Morgan Electro Ceramics, Transducer Products Division, Excellence in piezoelectric technology. Typical Values of Lead Zirconate Titanate Materials, Table 3, p. 10, 1999.
8. Malvern Instruments website, http://www.malvern.co.uk/Laboratory/laser. htm.
9. R. N. Torah, S. P. Beeby, and N. M. White, "A study of the effect of powder preparation and milling process on the piezoelectric properties of thick-film PZT," presented at Eurosensors XVI, Prague, 2002.
10. B. Jaffe and W. R. Cook, Piezoelectric Ceramics. New York: Academic, 1971.
11. P. Dargie, R. Sion, J. Atkinson, and N. M. White, "An investigation of the effect of poling conditions on the characteristics of screen-printed piezoceramics," Microelectron. Int., vol. 15, no. 2, pp. 6-10, 1998.
12. R. N. Torah, S. P. Beeby, and N. M. White, "Experimental investigation into the effect of substrate clamping on the piezoelectric behaviour of thick-film PZT elements," J. Phys. D: Appl. Phys., vol. 37, pp. 1074-1078, April 2004.
13. R. N. Torah, "Optimisation of the piezoelectric properties of thick-film piezoceramic devices," Ph.D. Transfer thesis, University of Southampton, 2002, Southampton, UK.