Magnetic null discharge sputtering with full target erosion

Surface and Coatings Technology

Volumn 193, Issue 1-3 SPEC. ISS., 2005, Pages 123-128

  Sung, Youl Moon ^a  

^a UNIVERSITY OF MIYAZAKI   (Japan)

Author keywords

Magnetic null plasma; Neutral loop discharge; Sputtering; Target erosion

Indexed keywords

ELECTRONS; EROSION; MAGNETIC FIELDS; PLASMAS; ROTATING DISKS;

DISCHARGE SPUTTERING; NULL FIELD REGION; TARGET EROSION; TARGET SURFACE;

MAGNETRON SPUTTERING;

COATING;

EID: 13844271954     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.07.122     Document Type: Article

References (16)

1. J.A. Thornton Met. Finish. 77 1997 45
2. R. Kukla J. Kieser M. Mayer IEEE Trans. Magn. 23 1987 137
3. T. Takahashi M. Naoe IEEE Trans. Magn. 25 1987 4174
4. J. Musil J. Vac. Sci. Technol., A 17 1999 555
5. T. Uchida Jpn. J. Appl. Phys. 33 1994 L43
6. Z. Yoshida et al. Phys. Rev. Lett. 81 1998 2458
7. W. Chen T. Hayashi M. Itoh Y. Morikawa Jpn. J. Appl. Phys. 38 1999 4296
8. T. Sakoda T. Miyao K. Uchino K. Muraoka Jpn. J. Appl. Phys. 36 1997 6981
9. Y.M. Sung K. Uchino K. Muraoka T. Sakoda J. Vac. Sci. Technol. A18 2000 2149
10. Y. Okraku-Yirenkyi Y.M. Sung et al. J. Vac. Sci. Technol., A 19 2001 2590
11. T. Sakoda Y. Okraku-Yirenkyi Y.M. Sung et al. Jpn. Appl. Phys. 40 2001 6607
12. Y.M. Sung C. Honda J. Vac. Sci. Technol., B 20 2002 1457
13. T. Sakoda Y.M. Sung J. Vac. Sci. Technol., A 20 2002 1964
14. Y.M. Sung et al. IEEE Trans. Plasma Sci. 30 2002 142
15. B. Chapman Glow Discharge Processes 1980 John Wiley and Sons New York
16. M. Yahaya et al. Proc. SPIE Int. Soc. Opt. Eng. 42 1998 3175