Diffusion barrier performances of thin Mo, Mo-N and Mo/Mo-N films between Cu and Si

Thin Solid Films

Volumn 476, Issue 1, 2005, Pages 142-147

  Song, Shuangxi ^a   Liu, Yuzhang ^a   Mao, Dali ^a   Ling, Huiqin ^a   Li, Ming ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Copper metallization; Diffusion barrier; Molybdenum; Sputtering

Indexed keywords

DIFFUSION IN SOLIDS; METALLIC FILMS; PARAMETER ESTIMATION; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THERMAL EFFECTS; X RAY DIFFRACTION;

COPPER METALLIZATION; DIFFUSION BARRIER; DIRECT CURRENT (DC) SPUTTERING; MO-BASED BARRIER MATERIALS;

THIN FILMS;

EID: 13844256787     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.09.046     Document Type: Article

References (20)

1. T. Nitta, T. Ohmi, M. Otsuki, T. Takewaki, and T. Shibata J. Electrochem. Soc. 139 1992 922
2. C.W. Park, and R.W. Vook Appl. Surf. Sci. 70/71 1993 639
3. E.R. Webber Appl. Phys., A 30 1983 1
4. Y. Shacham-Diamond, A. Dedhia, D. Hoffstetter, and W.G. Oldham J. Electrochem. Soc. 140 1993 2427
5. S.Q. Wang, S. Suthar, C. Hoeflich, and B.J. Burrow J. Appl. Phys. 73 1993 2301
6. M.-A. Nicolet Thin Solid Films 52 1978 415
7. M. Wittmer J. Vac. Sci. Technol., A, Vac. Surf. Films 2 1984 273
8. D.Y. Shih, C.A. Chang, J. Paraszczak, S. Nunes, and J. Cataldo J. Appl. Phys. 70 1991 3052
9. H. Ono, T. Nakano, and T. Ohta Appl. Phys. Lett. 64 1994 1511
10. L.C. Lane, T.C. Nason, G.R. Yang, T.M. Lu, and H. Bakhru J. Appl. Phys. 69 1991 6719
11. T. Oku, E. Kawakami, M. Uekubo, K. Takahiro, S. Yamaguchi, and M. Murakami Appl. Surf. Sc.i 99 1996 265
12. C.Y. Yang, J.S. Jeng, and J.S. Chen Thin Solid Films 420-421 2002 398
13. M. Stavrev, D. Fischer, C. Wenzel, K. Drescher, and N. Mattern Thin Solid Films 307 1997 79
14. Y.J. Lee, B.S. Suh, S.K. Rha, and C.O. Park Thin Solid Films 320 1998 141
15. J. Valli, and U.M. Makela J. Vac. Sci. Technol., A, Vac. Surf. Films 4 1986 2850
16. S. Luby, E. Majkova, M. Jergel, M. Brunel, G. Leggieri, A. Luches, G. Majni, and P. Mengucci Thin Solid Films 277 1996 138
17. J.C. Chuang, S.L. Tu, and M.C. Chen Thin Solid Films 346 1999 299
18. Y. He, and J.Y. Feng J. Cryst. Growth 263 2004 203
19. H.J. Lee, K.W. Kwon, C. Ryu, and R. Sinclair Acta Mater. 47 1999 3965
20. C.S. Liu, and L.J. Chen Thin Solid Films 262 1995 187