SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 277, Issue 1-2, 1996, Pages 138-143

Stability of interfaces in Mo/Cu multilayered metallization

(8) Luby, S a Majkova, E a Jergel, M a Brunel, M b Leggieri, G c Luches, A c Majni, G d Mengucci, P d

a INSTITUTE OF PHYSICS (Slovakia)

b CNRS (France)

c UNIVERSITY OF SALENTO (Italy)

d UNIVERSITÀ POLITECNICA DELLE MARCHE (Italy)

Author keywords

Copper; Interfaces; Molybdenum; Multilayers

Indexed keywords

ANNEALING; COPPER; DIFFUSION; MAGNETRON SPUTTERING; METALLIZING; MOLYBDENUM; MULTILAYERS; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; VACUUM APPLICATIONS;

CONDUCTING LAYERS; DIFFUSION BARRIERS; ELECTRON DIFFRACTION SPECTROSCOPY; GRAIN BOUNDARY DIFFUSION; GRAZING INCIDENCE CONFIGURATIONS; INTERFACE STABILITY; INTERMIXING; MULTILAYERED METALLIZATION; RESISTOMETRY;

INTERFACES (MATERIALS);

EID: 0030142693 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/0040-6090(95)08014-7 Document Type: Article

Times cited : (12)

References (15)

1
- 0027884466
- S.P. Murarka, R.J. Guttmann, A.E. Kaloyeros and W.A. Lanford, Thin Solid Films, 236 (1993) 257.
- (1993) Thin Solid Films , vol.236 , pp. 257
- Murarka, S.P.¹ Guttmann, R.J.² Kaloyeros, A.E.³ Lanford, W.A.⁴

2
- 84972029133
- J. Li, T.E. Seidel and J.W. Mayer, MRS Bull., 19 (1994) 15.
- (1994) MRS Bull. , vol.19 , pp. 15
- Li, J.¹ Seidel, T.E.² Mayer, J.W.³

3
- 0000769065
- C.W. Park and R.W. Vook, Appl. Phys. Lett., 59 (1991) 175; Appl. Surf. Sci. 70/71 (1993) 639.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 175
- Park, C.W.¹ Vook, R.W.²

4
- 3843051073
- C.W. Park and R.W. Vook, Appl. Phys. Lett., 59 (1991) 175; Appl. Surf. Sci. 70/71 (1993) 639.
- (1993) Appl. Surf. Sci. , vol.70-71 , pp. 639

5
- 84972048135
- J.M.E. Harper, E.G. Colgen, C.-K. Hu, J.P. Hummel, L.P. Buchwalter and C.E. Uzoh, MRS Bull., 19 (1994) 23.
- (1994) MRS Bull. , vol.19 , pp. 23
- Harper, J.M.E.¹ Colgen, E.G.² Hu, C.-K.³ Hummel, J.P.⁴ Buchwalter, L.P.⁵ Uzoh, C.E.⁶

6
- 36449007074
- S.-Q. Wang, S. Suthar, C. Hoeflich and B.J. Burrow, J. Appl. Phys., 73 (1993) 2301.
- (1993) J. Appl. Phys. , vol.73 , pp. 2301
- Wang, S.-Q.¹ Suthar, S.² Hoeflich, C.³ Burrow, B.J.⁴

7
- 84971922594
- S.Q. Wang, MRS Bull., 19 (1994) 30.
- (1994) MRS Bull. , vol.19 , pp. 30
- Wang, S.Q.¹

8
- 0000156618
- H. Ono, T. Nakano and T. Ohta, Appl. Phys. Lett., 64 (1994) 1511.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1511
- Ono, H.¹ Nakano, T.² Ohta, T.³

9
- 0026220023
- R. Whiting and M.A. Angadi, Meas. Sci. Technol., 2 (1991) 879.
- (1991) Meas. Sci. Technol. , vol.2 , pp. 879
- Whiting, R.¹ Angadi, M.A.²

10
- 0017272396
- A.R. Miedema, Philips Tech. Rev., 36 (1976) 217.
- (1976) Philips Tech. Rev. , vol.36 , pp. 217
- Miedema, A.R.¹

11
- 30244498948
- G. Hecht, F. Richter and J. Hahn (eds.), DGM Informationsgesel, Verlag, Oberursel
- S. Luby, E. Majkova, M. Jergel, M. Brunel, G. Leggieri and A. Luches, in G. Hecht, F. Richter and J. Hahn (eds.), Proc. 4th Int. Symp. TAFT'94 and 11th Conf. HVITF'94, DGM Informationsgesel, Verlag, Oberursel, 1994, p. 316.
- (1994) Proc. 4th Int. Symp. TAFT'94 and 11th Conf. HVITF'94 , pp. 316
- Luby, S.¹ Majkova, E.² Jergel, M.³ Brunel, M.⁴ Leggieri, G.⁵ Luches, A.⁶

12
- 30244504667
- Paris Soc. France du Vide
- P. Kuecher and G. Roeska, Proc. Int. Symp. Trend and New Appl. of Thin Films, Paris Soc. France du Vide, 1987, p. 139.
- (1987) Proc. Int. Symp. Trend and New Appl. of Thin Films , pp. 139
- Kuecher, P.¹ Roeska, G.²

13
- 0027607255
- D.P. Tracy and D.B. Knorr, J. Electron. Mater., 22 (1993) 611.
- (1993) J. Electron. Mater. , vol.22 , pp. 611
- Tracy, D.P.¹ Knorr, D.B.²

14
- 30244577583
- N. Artune and Z.Z. Ozturk, J. Appl. Phys., 74 (1993) 249.
- (1993) J. Appl. Phys. , vol.74 , pp. 249
- Artune, N.¹ Ozturk, Z.Z.²

15
- 0016083241
- R.S. Nowicki, W.D. Buckley, W.D. Mackintosh and I.V. Mitchell, J. Vac. Sci. Technol., 11 (1974) 675.
- (1974) J. Vac. Sci. Technol. , vol.11 , pp. 675
- Nowicki, R.S.¹ Buckley, W.D.² Mackintosh, W.D.³ Mitchell, I.V.⁴

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