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Materials Science and Engineering: B

Volumn 76, Issue 2, 2000, Pages 107-115

Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

(2) Shen, Y G a Mai, Y W a

a UNIVERSITY OF SYDNEY (Australia)

Author keywords

Oxygen; Reactive magnetron sputtering; Residual stress; Structural properties; Tungsten nitride films

Indexed keywords

EID: 0347740311 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(00)00424-4 Document Type: Article

Times cited : (22)

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