Comparison of nanometer-thick films by x-ray reflectivity and spectroscopic ellipsometry

Review of Scientific Instruments

Volumn 76, Issue 2, 2005, Pages

  Kohli, Sandeep ^a   Rithner, Christopher D ^a   Dorhout, Peter K ^a   Dummer, Ann M ^b   Menoni, Carmen S ^b  

^a Department of Environmental and Radiological Health Sciences   (United States)

^b Engineering Research Center and Hydraulics Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LINEARLY GRADED INTERFACE LAYERS; NANOMETER FILMS; SPECTROSCOPIC ELLIPSOMETRY (SE); X-RAY REFLECTIVITY (XRR);

COMPOSITION; ELLIPSOMETRY; INTERFACES (MATERIALS); LINEAR EQUATIONS; TANTALUM COMPOUNDS; THICKNESS MEASUREMENT;

THICK FILMS;

EID: 13744255205     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1848660     Document Type: Article

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