Ion-assist applications of broad-beam ion sources

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5527, Issue , 2004, Pages 50-68

  Kaufman, H R ^a   Harper, J M E ^b  

^a Kaufman and Robinson Inc   (United States)

^b University of New Hampshire   (United States)

Author keywords

Deposition; Ion assist; Ion sources; LAD; Thin films

Indexed keywords

BOAD-BEAM ION SOURCES; IAD; ION ASSIST; ION ENERGIES;

ATOMS; CURRENT DENSITY; DEPOSITION; INDUSTRIAL APPLICATIONS; LATTICE VIBRATIONS; POLYCRYSTALLINE MATERIALS; SILICON; THIN FILMS;

ION SOURCES;

EID: 13644269084     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559785     Document Type: Conference Paper

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