Biased target deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 1, 2000, Pages 37-41

  Zhurin, V V ^a  

^a Front Range Veterinary Clinic   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRON EMISSION; ELECTRON SOURCES; FILM PREPARATION; ION BEAMS; ION SOURCES; SPUTTERING; THICKNESS MEASUREMENT; THIN FILMS;

BIASED TARGET DEPOSITION APPARATUS; LOW ENERGY ION SOURCE; MAGNETORESISTIVE DEVICES;

DEPOSITION;

EID: 0033708050     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582155     Document Type: Article

References (2)

1. B. A. Everitt and A. V. Pohm, J. Vac. Sci. Technol. A 16, 1794 (1998).
2. J. A. Caballero, Y. D. Park, J. R. Childress, J. Bass, W.-C. Chiang, A. C. Reilly, W. P. Pratt, Jr., and F. Petroff, J. Vac. Sci. Technol. A 16, 1801 (1998).