Deposition of indium tin oxide films on polycarbonate substrates by using ion beam processes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 5, 2003, Pages 2060-2066

  Cho, Jun Sik ^a   Koh, Seok Keun ^a   Yoon, Ki Hyun ^b  

^a Research and Development Center   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; FILM GROWTH; INTERFACIAL ENERGY; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; POLYCARBONATES; SUBSTRATES; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

INDIUM TIN OXIDE FILMS; POLYCARBONATE SUBSTRATES;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0242677572     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1605430     Document Type: Article

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