X-ray reflectivity studies of ferroelectric and dielectric multilayer structures

Physica B: Condensed Matter

Volumn 357, Issue 1-2 SPEC. ISS., 2005, Pages 122-125

  Cao, Jiang Li ^a   Solbach, Axel ^a   Klemradt, Uwe ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Electrode; Ferroelectrics; Multilayer; X ray reflectivity

Indexed keywords

CAPACITORS; CMOS INTEGRATED CIRCUITS; DIELECTRIC DEVICES; DYNAMIC RANDOM ACCESS STORAGE; ELECTRIC FIELDS; ELECTRODES; FERROELECTRIC DEVICES; LEAD COMPOUNDS; MAGNETIC STORAGE; MULTILAYERS; STOICHIOMETRY;

DIFFUSE REFLECTIVITY; ELECTRICAL STRESS; NON-VOLATILE RANDOM-ACCESS MEMORIES (NVRAM); X-RAY REFLECTIVITY;

THIN FILMS;

EID: 13444301374     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2004.11.039     Document Type: Conference Paper

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