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Volumn 475, Issue 1-2 SPEC. ISS., 2005, Pages 323-326

Deposition of TiN thin films using grid-assisting magnetron sputtering

Author keywords

Corrosion; Grid assisted magnetron sputtering; OES; TiN

Indexed keywords

CORROSION; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; FILM GROWTH; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; SEPARATION; SUBSTRATES; TITANIUM NITRIDE;

EID: 13444283775     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.07.018     Document Type: Conference Paper
Times cited : (5)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.