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Volumn 475, Issue 1-2 SPEC. ISS., 2005, Pages 323-326
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Deposition of TiN thin films using grid-assisting magnetron sputtering
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Author keywords
Corrosion; Grid assisted magnetron sputtering; OES; TiN
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Indexed keywords
CORROSION;
ELECTRIC FIELD EFFECTS;
ELECTROSTATICS;
FILM GROWTH;
MAGNETRON SPUTTERING;
PHYSICAL VAPOR DEPOSITION;
SEPARATION;
SUBSTRATES;
TITANIUM NITRIDE;
ELECTROSTATIC FORCE;
GRID-ASSISTED MAGNETRON SPUTTERING;
ION PARTICLE ENERGY;
OES;
THIN FILMS;
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EID: 13444283775
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2004.07.018 Document Type: Conference Paper |
Times cited : (5)
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References (9)
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