Characterization of CNx thin films prepared by close field unbalanced magnetron sputtering

Thin Solid Films

Volumn 475, Issue 1-2 SPEC. ISS., 2005, Pages 298-302

  Park, Yong Seob ^a   Myung, Hyun Sik ^a   Han, Jeon Geon ^a   Hong, Byungyou ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Carbon nitride; CFUBM; Hardness

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; DIAMOND LIKE CARBON FILMS; ENERGY DISPERSIVE SPECTROSCOPY; FRICTION; GRAPHITE; HARDNESS; MAGNETRON SPUTTERING; MAGNETRONS; RAMAN SPECTROSCOPY; STIFFNESS; THIN FILMS; TRIBOLOGY; WEAR RESISTANCE;

CLOSED FIELD UNBALANCED MAGNETRON (CFUBM); CONTINUOUS STIFFNESS METHOD (CMS); DEPOSITION RATES; RAMAN BAND;

CARBON NITRIDE;

EID: 13444259576     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.07.032     Document Type: Conference Paper

References (10)

1. Amy Y. Liu, and M.L. Cohen Phys. Rev., B 41 1990 10727
2. N. Alba de Sanchez, C. Carrasco, and P. Prieto Physica, B 337 2003 318
3. A. Fernandez, C. Ternandez-Ramos, and J.C. Sanchez-Lopez Surf. Coat. Technol. 163-164 2003 527
4. Jeansong Shiao, and Richard W. Hoffman Thin Solid Films 283 1996 145
5. A. Champi, R.G. Lacerda, and F.C. Marques Thin Solid Films 420-421 2002 200
6. J. Takadoun, J.Y. Rauch, J.M. Cattenot, and M. Martin Surf. Coat. Technol. 174-175 2003 427
7. Y. Kusano, J.E. Evetts, R.E. Somekh, and Hutchings Thin Solid Films 332 1998 56
8. Sommath Bhattacharyya, C. Cardinard, and G. Turban J. Appl. Phys. 83 1998 4491
9. A.C. Terrari, and J. Robertson Phys. Rev., B 61 2000 14095
10. P.V. Kola, D.C. Cameron, B.J. Meenan, K.A. Pischow, C.A. Anderson, N.M.D. Brown, and M.S.J. Hashmi Surf. Coat. Technol. 74-75 1995 696