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Volumn 264, Issue 1-3, 2004, Pages 139-149
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The surface modification and reactivity of LiGaO2 substrates during GaN epitaxy
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Author keywords
A1. Surface processes; A3. Molecular beam epitaxy; B1. Nitrides
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ELLIPSOMETRY;
ETCHING;
GALLIUM NITRIDE;
HYDROGEN;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MOLECULAR BEAM EPITAXY;
NITRIDES;
NITROGEN;
REACTION KINETICS;
REFLECTION HIGH ENERGY ELECTRON DIFFRACTION;
VAPORIZATION;
X RAY PHOTOELECTRON SPECTROSCOPY;
LATTICE MISMATCH;
SURFACE PROCESSES;
LITHIUM COMPOUNDS;
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EID: 1342306672
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2004.01.018 Document Type: Article |
Times cited : (13)
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References (19)
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