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Volumn 177-178, Issue , 2004, Pages 44-51
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Texture, structure and phase transformation in sputter beta tantalum coating
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Author keywords
Beta tantalum; Hot hardness; Magnetron sputter deposition; Phase transformation; Structure; Tetragonal tantalum; Texture
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Indexed keywords
ANNEALING;
COMPUTER SIMULATION;
DATA REDUCTION;
EROSION;
HARDNESS;
PHASE TRANSITIONS;
SPUTTER DEPOSITION;
TANTALUM;
TEXTURES;
WEAR OF MATERIALS;
X RAY DIFFRACTION ANALYSIS;
DIFFRACTION PATTERNS;
SPUTTER GAS PRESSURES;
COATINGS;
COATING;
EROSION CORROSION;
HIGH TEMPERATURE CORROSION;
STRUCTURAL ANALYSIS;
TANTALUM;
WEAR PREVENTION;
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EID: 1342289411
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.06.008 Document Type: Article |
Times cited : (87)
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References (26)
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