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Volumn 149, Issue 1, 2002, Pages 62-69
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High-rate sputter deposited tantalum coating on steel for wear and erosion mitigation
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Author keywords
Anisotropy; Phase; Refractory coating; Residual stress; Sputtering; Tantalum; Thick coating; Triode sputtering
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Indexed keywords
ADHESION;
HIGH TEMPERATURE EFFECTS;
PRESSURE EFFECTS;
SPUTTER DEPOSITION;
SUBSTRATES;
TANTALUM;
TANTALUM COATINGS;
METALLIZING;
EROSION;
METALLIC COATING;
RESIDUAL STRESS;
SPUTTERING;
STEEL;
TANTALUM;
WEAR RESISTANCE;
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EID: 0036147248
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01383-4 Document Type: Article |
Times cited : (49)
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References (22)
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