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Volumn 149, Issue 1, 2002, Pages 62-69

High-rate sputter deposited tantalum coating on steel for wear and erosion mitigation

Author keywords

Anisotropy; Phase; Refractory coating; Residual stress; Sputtering; Tantalum; Thick coating; Triode sputtering

Indexed keywords

ADHESION; HIGH TEMPERATURE EFFECTS; PRESSURE EFFECTS; SPUTTER DEPOSITION; SUBSTRATES; TANTALUM;

EID: 0036147248     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01383-4     Document Type: Article
Times cited : (49)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.