High aspect ratio grating fabrication by imprint lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5515, Issue , 2004, Pages 187-194

  Hirai, Yoshihiko ^a   Konishi, Takaaki ^a   Kanakugi, Tomohiro ^a   Kawata, Hiroaki ^a   Kikuta, Hisao ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

Aspect ratio; Grating; Imprint lithography; Optical element; Optical switch; Quarter wave plate

Indexed keywords

IMPRINT LITHOGRAPHY; NANO FABRICATION; NANO OPTICAL ELEMENTS; QUARTER WAVE PLATE;

ASPECT RATIO; FABRICATION; FRICTION; LITHOGRAPHY; OPTICAL DEVICES; OPTICAL SWITCHES; PATTERN MATCHING; POLYMETHYL METHACRYLATES; STRESS ANALYSIS; THIN FILMS;

DIFFRACTION GRATINGS;

EID: 13244284659     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.560249     Document Type: Conference Paper

References (7)

1. H. Herzing, Micro-optics, Taylor & Francis, London, 1997.
2. S. Chou, P. Krauss and P. Renstrom: "Nanoimprint lithography",J. Vac. Sci. Technol. B14, pp.4129-4133, 1996.
3. M. D. Austin, H. Ge, W. Wu, D. Wasserman, S.Lyon, and S. Chou: 'Fabrication of 5 nm line width and 14 nm pitch features by nanoimprint lithography', Abstract of 2-nd International Conf. on Nanoimprint Nanoprint Technol., (Boston, 2004) D5.
4. Y. Hirai, S. Yoshida, N. Takagi,: 'Defect analysis in thermal nano imprint lithography', J. Vac. Sci. Technol. B21, pp.2765-2770 (2003).
5. Y. Hirai, S. Yoshida, N. Takagi, Y. Tanaka, H. Yabe, K. Sasaki, H. Sumitani, K. Yamamoto: 'High aspect pattern fabrication by nano imprint lithography using fine diamond mold ', Jpn. J. Appl.Phys., 42, Part 1, pp. 3863-3866, (2003).
6. A. Miyauchi, Masahiko O. Takuji Ando, K. Kuwabara: 'Nanopillars fabricated on 6-inch wafer by high aspect nanoprint technology', Abstract of 2-nd International Conf. on Nanoimprint Nanoprint Technol., (Boston, 2004) P14.
7. Y. Hirai, S. Yoshida, A. Okamoto, Y. Tanaka, M. Endo, S. Irie, H. Nakagawa, M. Sasago: ' Mold surface treatment for imprint lithography ', J. Photopolym. Sci. Technol., 14, pp. 457-462, (2001).