In situ observation of carbon-nanopillar tubulization process

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3221-3223

  Ichihashi, Toshinari ^a,b   Ishida, Masahiko ^a,b   Ochiai, Yukinori ^a,b   Fujita, Jun Ichi ^b,c  

^a NEC CORPORATION   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CATALYSTS; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; ELECTRON BEAMS; ELECTRON DIFFRACTION; HEATING; IRON; MOLECULAR DYNAMICS; PHASE TRANSITIONS; SYNTHESIS (CHEMICAL);

CARBON-NANOPILLARS; GRAPHITIC TUBULES; NANOTUBE ELECTRONIC DEVICES; TUBULIZATION PROCESS;

CARBON NANOTUBES;

EID: 13244279804     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1808713     Document Type: Conference Paper

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