SiGeC HBTs: The TCAD Challenge Reduced to Practice

Materials Science in Semiconductor Processing

Volumn 8, Issue 1-3 SPEC. ISS., 2005, Pages 283-288

  Decoutere, Stefaan ^a   Sibaja Hernandez, Arturo ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

HBT; SiGeC; TCAD

Indexed keywords

BORON; CARBON; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DIFFUSION; MATHEMATICAL MODELS; OPTIMIZATION; RATE CONSTANTS; SEMICONDUCTING SILICON COMPOUNDS; STRAIN;

CARBON DIFFUSION; CIRCUIT SIMULATIONS; SIGEC; TCAD;

HETEROJUNCTION BIPOLAR TRANSISTORS;

EID: 13244276339     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2004.09.086     Document Type: Conference Paper

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