Reel-to- reel cassette cluster tool system for thin film transistor and four terminal solar cell fabrication

Materials Research Society Symposium Proceedings

Volumn 814, Issue , 2004, Pages 47-58

  Madan, Arun ^a  

^a MVSystems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; GRAIN SIZE AND SHAPE; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLAR CELLS; X RAY DIFFRACTION ANALYSIS;

FABRICATION PROCESS; MULTI-CHAMBER SYSTEMS; ROLL-TO-ROLL PROCESS; SUBSTRATE TEMPERATURE;

THIN FILM TRANSISTORS;

EID: 12944331175     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-814-i2.9/a3.9     Document Type: Conference Paper

References (31)

1. S. Fujikake, K. Tabuchi, T. Yoshida, Y.Ichikawa, H. Sakai, MRS Proc.377, 609, 1995: Y.Ichikawa, S. Fujikake, K. Tabuchi, T.Sasaki, T.Hama, T. Yoshida, H. Sakai, M.Saga, MRS Proc. 557, 703, 1999.
2. S. Fujikake, K. Tabuchi, T. Yoshida, Y.Ichikawa, H. Sakai, MRS Proc.377, 609, 1995: Y.Ichikawa, S. Fujikake, K. Tabuchi, T.Sasaki, T.Hama, T. Yoshida, H. Sakai, M.Saga, MRS Proc. 557, 703, 1999.
3. G.Demaggio,J.Doehler,T.Elliosn, M.Izu, S.Jones.J.Karn, R.Kopf, M.Lycette, W.Messing,H.Ovshinsky, S.Ovshinsky, A.Banerjee, J. Call, W.Chan, G. Dio, S.Guha, K.Hoffma, R.Liu, P.Nam, J. Yang, NCPV Review Meeting, Denver, March 2003. To be published in AIP.
4. US patent #6,258,40881: Semiconductor Vacuum Deposition System and Method having a Reel to Reel Substrate Cassette.
5. See for instance, "Physics and Applications of Amorphous Semiconductor Devices" by A. Madan, M. Shaw, Academic Press, 1988.
6. th IEEE Photovoltiac Conference, Florida, p 698, 1981.
7. th European Photovolatic Conference, Glasgow, UK, p609, 2000.
8. A.Sazanov, A.Nathan, J.Non. Cryst. Solids, 266-269, 1329, 2000.
9. J. Yang, S. Guha, MRS Proc., 557, 239, 1999.
10. D. L. Staebler, and C. R. Wronski, Appl. Phys. Lett. 31, 292, 1977.
11. J. Yang, and S. Guha, Appl. Physics Letters 70, 2975, 1997.
12. K. Yamamoto, M. Yoshimi, T. Suzuki, T. Nakata, T. Sawada, A. Nakajima, and K.Hayashi, IEEE PV conference, p. 1428, 2000.
13. J. Meier, R. Fluckiger, H. Keppner and A. Shah, Appl. Phys. Lett. 65, 860, 1994.
14. J. Meier et al., Proc. MRS, 507, 131, 1996.
15. A. Madan, patent pending.
16. th Europena Photovolatic Conference, Glasgow, UK, p 1279, 2000.
17. T. Jamali-Beh, S. Chen, H.Liu, Y Lee and C.R.Wronski, MRS Proc. 377, 627 (1995).
18. M.Hack, J.McGill, W.Czubatyj, R.Singh, M.Shur and A.Madan, J. Appl. Phys. 53, 6270, 1982.
19. U. Das, S. Morrison, E. Centurioni, and A. Madan, IEE Proc.-Circuits Devices Syst., 150, 282, 2003.
20. th IEEE Photovoltaic Spec. Conf., Anchorage, USA, pp. 784-787, 2000.
21. Y. Nasuno, M.Kondo M.,A. Matsuda, Appl. Phys. Lett., 78,2330, 2001
22. Y.Chen, S.Wagner, Appl.Phys Lett. 75,1125,1999: M.Mulato, Y.Chen, S.Wagner, A.R.Zanatta, J.Non Cryst. Solids, 266-269, 1260, 2000.
23. Y.Chen, S.Wagner, Appl.Phys Lett. 75,1125,1999: M.Mulato, Y.Chen, S.Wagner, A.R.Zanatta, J.Non Cryst. Solids, 266-269, 1260, 2000.
24. I-Chun Cheng, S. Wagner, S.Bae, S.J.Fonash, 664, A26.1.1, 2001.
25. th IEEE Photovoltaic Spec. Conf., Anchorage, USA, pp. 142, 2000.
26. T. Roschek, T. Repmann, O. Kluth, J. MÜller, B. Rech, H. Wagner H, MRS Proc., 664, pp. A4.3.1, 2002
27. th IEEE Photovoltaic Spec. Conf., Anaheim, USA, pp. 569-574, 1997.
28. th IEEE Photovoltaic Spec. Conf., Anchorage, USA, pp. 134-137, 2000
29. S. Klein, F. Finger, R. Carius, B. Rech, L. Houben, M. Luysberg,M. Stutzmann M. Mat. Res. Soc. Symp. Proc., 664, pp. A4.3.1-A4.3.12, 2002
30. J. Meier, E. Vallat-Sauvain, S. Dubail, U. Kroll, J. Dubail, S. Golay, L. Feitknecht, P. Torres, S. Fay, D. Fischer, A. Shah, Solar Energy Materials & Solar Cells, 66, pp. 73-84, 2001.
31. A.Madan, patent pending.