Effects of oxygen impurity on microcrystalline silicon films

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn 2000-January, Issue , 2000, Pages 784-787

  Kamei, Toshihiro ^a   Wada, Takehito ^a   Matsuda, Akihisa ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AGGREGATES; CARRIER CONCENTRATION; CRYSTAL IMPURITIES; IMPURITIES; MICROCRYSTALLINE SILICON; SUPERCONDUCTING FILMS;

CRYSTAL QUALITIES; ELECTRON CARRIER DENSITY; LOWER TEMPERATURES; MICROCRYSTALLINE SI; MICROCRYSTALLINE SILICON FILMS; OXYGEN CONCENTRATIONS; OXYGEN IMPURITY; SUPERLINEAR;

OXYGEN;

EID: 84949545409     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2000.916000     Document Type: Conference Paper

References (9)

1. J. Meier et al., "On the way towards high efficiency thin-film silicon solar cells by the "micromorph" concept", Mat. Res. Soc. Symp. Proc. 420, 1996, pp. 3-14.
2. T. Kamei, M. Kondo, and A. Matsuda, "A significant reduction of impurity contents in hydrogenated microcrystalline silicon films for increased grain size and reduced defect density", Jpn. J. Appl. Phys. 37, 1998, pp. L265-L268.
3. T. Kamei, and A. Matsuda, "Deposition of ultrapure hydrogenated amorphous silicon", J. Vac. Sci. Techol. A 17, 1999, pp. 113-120.
4. T. Kinoshita et al., "Influence of oxygen and nitrogen in the intrinsic layer of a-Si:H solar cells", Jpn. J. Appl. Phys. 35, 1996, pp. 3819-3824.
5. T. Kamei, P. Stradins, and A. Matsuda, "Effects of embedded crystallites in amorphous silicon on light-induced defect creation", Appl. Phys. Lett. 74, 1999, pp. 1707-1709.
6. T. I. Kamins, Polycrystalline Silicon For Integrated Circuits and Displays, Kluwer Academic Publishers.
7. T. Shimizu et al., "Nature of localized states in hydrogenated Si-based amorphous semiconductor films elucidated from LESR and CPM", Jpn. J. Appl. Phys. 28, 1989, pp. 586-592.
8. F. Shimura, Oxygen in Silicon, Academic Press, Inc.
9. D. V. Tsu et al., "Effect of hydrogen dilution on the structure of amorphous silicon alloys", Appl. Phys. Lett. 71, 1997, pp. 1317-131