Electromechanical properties of Pb(Zr,Ti)O3 films for MEMS applications

Journal of the Korean Physical Society

Volumn 42, Issue SUPPL., 2003, Pages

  Kim, Seung Hyun ^a   Yang, Jeong Suong ^a   Koo, Chang Young ^a   Yeom, Jung Hoon ^a   Lee, Dong Su ^a   Ha, Jowoong ^a   Hwang, Cheol Seong ^b   Hwang, Kyu Ho ^c  

^a INOSTEK Inc   (South Korea)

^b Seoul National University   (South Korea)

^c M2N Inc   (South Korea)

Author keywords

Composition; Dielectric; Ferroelectric; MEMS; Pb(Zr,Ti)O3 films; Piezoelectric

Indexed keywords

EID: 19744376634     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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