Smoothing of diamond-turned substrates for extreme ultraviolet illuminators

Optical Engineering

Volumn 43, Issue 12, 2004, Pages 3089-3095

  Soufli, Regina ^a   Spiller, Eberhard ^a   Schmidt, Mark A ^a   Robinson, Jeff C ^a   Baker, Sherry L ^a   Ratti, Susan ^a   Johnson, Michael A ^a   Gullikson, Eric M ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Diamond turned optics; Extreme ultraviolet lithography; Illumination; Multilayers; Smoothing

Indexed keywords

LIGHT REFLECTION; LITHOGRAPHY; OPTICAL COATINGS; OPTICAL FILMS; OPTICAL MULTILAYERS; SUBSTRATES; ULTRAVIOLET RADIATION;

DIAMOND TURNED OPTICS; EXTREME ULTRAVIOLET LITHOGRAPHY; SMOOTHING;

OPTICS;

EID: 12844284651     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1815005     Document Type: Article

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