Theoretical analysis and measurement of the temperature dependence of a micromachined Fabry-Perot pressure sensor

Applied Optics

Volumn 44, Issue 2, 2005, Pages 249-256

  Guo, Dagang ^a   Wang, Weijun ^a   Lin, Rongming ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; DIAPHRAGMS; MICROMACHINING; OPTICAL SENSORS; PHOTOELASTICITY; REMOTE SENSING; THERMAL EFFECTS; THERMODYNAMIC STABILITY;

CAPACITIVE SENSORS; FIBER-OPTICAL SENSORS; MICROCAVITY SENSORS; PRESSURE SENSORS;

PARTIAL PRESSURE SENSORS;

EID: 12844263473     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.000249     Document Type: Article

References (14)

1. Y. Kim and D. P. Neikirk, "Micromachined Fabry-Perot cavity pressure transducer," IEEE Photon. Technol. Lett. 7, 1471-1473 (1995).
2. D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001).
3. J. Han, J. Y. Kim, T. S. Kim, and J. S. Kim, "Performance of Fabry-Perot microcavity structures with corrugated diaphragms," Sens. Actuators A 79, 162-172 (2000).
4. S. Sakaguchi, "Temperature dependence of transmission characteristics of multilayer film narrow bandpass filters," Jpn. J. Appl. Phys. 38, 6362-6368 (1999).
5. A. Zoller, R. Gotzelmann, K. Matl, and D. Cushing, "Temperature- stable bandpass filters deposited with plasma ion-assisted deposition," Appl. Opt. 35, 5609-5612 (1996).
6. V. L. Spiering, S. Bouwstra, and R. M. E. J. Spiering, "On-chip decoupling zone for package-stress reduction," Sens. Actuators A 39, 149-156 (1993).
7. W. J. Wang, R. M. Lin, and D. G. Guo, "Study of single deeply corrugated diaphragm for high sensitivity microphones," J. Micromech. Microeng. 13, 184-189 (2003).
8. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, Bristol, UK, 2001).
9. H. Aben and C. Guillemet, Photoelasticity of Glass (Springer-Verlag, Berlin, 1993).
10. T. C. Chen, J. I. Kuo, W. L. Lee, and C. C. Lee, "Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters," Jpn. J. Appl. Phys. 40, 4087-4096 (2001).
11. W. J. Wang, R. M. Lin, T. T. Sun, D. G. Guo, and Y. Ren, "Performance-enhanced Fabry-Perot microcavity structure with a novel non-planar diaphragm," Microelectron. Eng. 70, 102-108 (2003).
12. F. I. Niordson, Shell Theory (North-Holland, Amsterdam, 1985).
13. M. Abramowitz and I. A. Stegun, Handbook of Mathematical Functions (Dover, New York, 1970).
14. E. D. Palik, ed., Handbook of Optical Constants of Solids (Academic, Orlando, Fla., 1985).