Formation of Si/SiC heterostructures for silicon-based quantum devices using single CH3SiH3-gas source free jet

Materials Research Society Symposium Proceedings

Volumn 815, Issue , 2004, Pages 83-88

  Ohtani, Ryota ^a   Ikoma, Yoshifumi ^a   Motooka, Teruaki ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CURRENT DENSITY; ELECTRIC POTENTIAL; EPITAXIAL GROWTH; HETEROJUNCTIONS; RESONANT TUNNELING; SEMICONDUCTOR QUANTUM WELLS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CURRENT-VOLTAGE CHARACTERISTICS; HOT FILAMENTS; QUANTUM DEVICES; ULTRA THIN FILMS;

SILICON COMPOUNDS;

EID: 12844261188     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-815-j5.11     Document Type: Conference Paper

References (13)

1. R. F. Davis, G. Keiner, M. Shur, J. W. Palmour and J.A. Edmond, Proc. IEEE 79, 677 (1991).
2. M. Mehregany, C.A. Zorman, MRS Bull. 26, 289 (2001).
3. U. Baumann, J. Pezoldt, V. Cimalla, O. Nennewitz, F. Schwierz and D. Schipanski, Institute of Physics Conference Series 142 (Institute of Physics, Bristol, 1996) p. 149.
4. E. R. Brown, in Heterostructures and Quantum Devices (Academic Press, 1994) p. 305.
5. Y. Ikoma, T. Endo, F. Watanabe and T. Motooka, Jpn. J. Appl. Phys. Part 2 38, L301 (1998).
6. Y. Ikoma, T. Endo, F. Watanabe and T. Motooka, Appl. Phys. Lett. 75, 3977 (1999).
7. Y. Ikoma, T. Endo, T. Tada, F. Watanabe and T. Motooka, Mater. Sci. Forum 338-342, 265 (2000).
8. Y. Ikoma, T. Tada, K. Uchiyama, F. Watanabe and T. Motooka, Solid State Phenom. 78-79, 157 (2001).
9. Y. Ikoma, K. Uchiyama, F. Watanabe and T. Motooka, Mater. Sci. Forum 389-393, 751 (2002).
10. Y. Ikoma, R. Ohtani and T. Motooka, Mater. Sci. Forum 457-460, 325 (2004)
11. W. R. Frensley, in Heterostructures and Quantum Devices (Academic Press, 1994) p. 273.
12. J. R. Waldrop and R. W. Grant, Appl. Phys. Lett. 56, 557 (1990).
13. H. B. Michaelson, J. Appl. Phys. 48, 4729 (1977).