Formation of SiC/Si multilayer structures on Si(100) by supersonic free jets of single gas source CH3SiH3

Materials Science Forum

Volumn 457-460, Issue I, 2004, Pages 325-328

  Ikoma, Y ^a   Ohtani, R ^a   Motooka, T ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Hot filament; Supersonic free jet CVD; XPS; XTEM

Indexed keywords

MULTILAYERS; POLYSILICON; RESONANT TUNNELING; SILANES; SILICON; SUPERSONIC FLOW; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN; X RAY PHOTOELECTRON SPECTROSCOPY;

CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY (XTEM); HOT FILAMENT; SUPERSONIC FREE JET CVD; TURBOMOLECULAR PUMPS;

SILICON CARBIDE;

EID: 8744295962     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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