Tip-radius effect in finite element modeling of sub-50 nm shallow nanoindentation

Thin Solid Films

Volumn 450, Issue 2, 2004, Pages 295-303

  Yu, Ning ^a   Polycarpou, Andreas A ^a   Conry, Thomas F ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Gold; Nanoindentation; Silicon; Tip radius

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; GOLD; HARDNESS; MAGNETIC DISK STORAGE; SILICON; THIN FILMS; YIELD STRESS;

NANOINDENTATION; TIP RADIUS;

INDENTATION;

EID: 1242332960     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.10.033     Document Type: Article

References (27)

1. Pethica J.B., Hutchings R., Oliver W.C. Philos. Mag. A. 48:1983;593.
2. Doerner M.F., Nix W.D. J. Mater. Res. 1:1986;601.
3. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
4. Whitehead A.J., Page T.F. Thin Solid Films. 220:1992;277.
5. Hainsworth S.V., Chandler H.W., Page T.F. J. Mater. Res. 11:1996;1984.
6. Lu W., Komvopoulos K. J. Appl. Phys. 85:1999;2642.
7. Li J., Thostenson E.T., Chou T., Riester L. J. Eng. Mater. Technol. 120:1998;154.
8. Tsui T.Y., Pharr G.M. J. Mater. Res. 14:1999;292.
9. Bhattacharya A.K., Nix W.D. Int. J. Solids Struct. 24:1988;881.
10. Lichinchi M., Lenardi C., Haupt J., Vitali R. Thin Solid Films. 312:1998;240.
11. Knapp J.A., Follstaedt D.M., Myers S.M., Barbour J.C., Friedmann T.A. J. Appl. Phys. 85:1999;1460.
12. Chen X., Vlassak J.J. J. Mater. Res. 16:2001;2974.
13. Pelletier H., Krier J., Cornet A., Mille P. Thin Solid Films. 379:2000;147.
14. Bouzakis K.D., Michialidis N., Erkens G. Surf. Coat. Technol. 142-144:2001;102.
15. McElhaney K.W., Vlassak J.J., Nix W.D. J. Mater. Res. 13:1998;1300.
16. Shih C.W., Yang M., Li J.C.M. J. Mater. Res. 6:1991;2623.
17. Shimamoto A., Tanaka K., Akiyama Y., Yoshizaki H. Philos. Mag. A. 74:1996;1097.
18. King R.B. Int. J. Solids Struct. 23:1987;1657.
19. Edlinger M.L., Gratacos P., Montmitonnet P., Felder E. Eur. J. Mech. A/Solids. 12:1993;679.
20. L. Kuhn, Technical Note NRL-S-012, Hysitron Inc, Minneapolis, MN, 1999.
21. Sun Y., Zheng S., Bell T., Smith J. Philos. Mag. Lett. 79:1999;649.
22. Xin K., Lambropoulos J.C. Proc. SPIE. 4102:2000;112.
23. Hay J.C., Bolshakov A., Pharr G.M. J. Mater. Res. 14:1999;2296.
24. Williams J.S., Chen Y., Wong-Leung J., Kerr A., Swain M.V. J. Mater. Res. 14:1999;2338.
25. Callister W.D. Materials Science and Engineering. 2000;Wiley, New York.
26. Lubliner J. Plasticity Theory. 1990;Macmillan, New York.
27. Volinsky A.A., Moody N.R., Gerberich W.W. Acta Mater. 50:2002;441.