Microporous layer structure in oxidized aluminium nitride polycrystals

Journal of Materials Processing Technology

Volumn 146, Issue 3, 2004, Pages 289-293

  Tseng, Wenjea J ^a   Tsai, Chir Jang ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Aluminium nitride (AlN); Interface; Microstructure; Oxidation

Indexed keywords

ADDITIVES; ADHESIVES; BONDING; ENERGY DISPERSIVE SPECTROSCOPY; GRAIN SIZE AND SHAPE; INTERFACES (MATERIALS); METALLOGRAPHIC MICROSTRUCTURE; MICROPOROUS MATERIALS; POLYCRYSTALS; SINTERING; SURFACE STRUCTURE; THERMOOXIDATION; THIN FILMS;

ISOTHERMAL EFFECTS; POROUS THIN FILMS;

ALUMINUM NITRIDE;

EID: 1242298448     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2003.11.008     Document Type: Article

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