Oxidation, microstructure and metallization of aluminum nitride substrates

Journal of Materials Science: Materials in Electronics

Volumn 11, Issue 2, 2000, Pages 131-138

  Tseng, Wenjea J ^a,b   Tsai, Chir Jang ^a   Fu, Shen Li ^a  

^a I SHOU UNIVERSITY   (Taiwan)

^b CHINESE CULTURE UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; DIFFUSION IN SOLIDS; GROWTH (MATERIALS); INTERFACES (MATERIALS); METALLIZING; OXIDATION; REACTION KINETICS; SUBSTRATES; THERMOANALYSIS;

ALUMINUM NITRIDE;

ALUMINUM COMPOUNDS;

EID: 0033732524     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1008977314768     Document Type: Article

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