SCOPUS 정보 검색 플랫폼

Volumn 33, Issue 15, 1999, Pages 3859-3865

Oxidation of aluminium nitride

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; OXIDATION; POLYCRYSTALLINE MATERIALS; REACTION KINETICS; SUBSTRATES;

ALUMINIUM NITRIDE; LINEAR RATE LAW; PARABOLIC RATE LAW;

NITRIDES;

EID: 0032131538 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/a:1004667906474 Document Type: Article

Times cited : (38)

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