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Volumn 1, Issue , 2003, Pages 787-794
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Direct write patterning of microchannels
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC MATERIALS;
ETCHING;
FLOW OF FLUIDS;
FLUIDICS;
IMAGE ANALYSIS;
LIGHT MODULATION;
MASKS;
MICROELECTROMECHANICAL DEVICES;
MICROOPTICS;
OPTICAL WAVEGUIDES;
PARTICLE BEAMS;
PHOTOLITHOGRAPHY;
PRINTING;
SURFACE PROPERTIES;
MICROCHANNELS;
MICROWELLS;
MULTI-LAYER FLUIDIC STRUCTURES;
PHOTOIMPRINTING;
SPATIAL LIGHT MODULATION;
CHANNEL FLOW;
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EID: 1242286605
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1115/icmm2003-1103 Document Type: Conference Paper |
Times cited : (4)
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References (11)
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