Surface-acoustic-wave delay line at 24 GHz using the guided Rayleigh mode in AlN/SiC structures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 4 A, 2003, Pages 1594-1595

  Takagaki, Yukihiko ^a   Brandt, Oliver ^a   Ploog, Klaus H ^a  

^a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

Author keywords

Aluminum nitride; Interdigital transducer; Rayleigh mode; Silicon carbide; Superhigh frequency; Surface acoustic wave

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ALUMINUM NITRIDE; COMPUTER SIMULATION; FOURIER TRANSFORMS; RAYLEIGH SCATTERING; SILICON CARBIDE; TRANSDUCERS;

GUIDED RAYLEIGH MODE; INTERDIGITAL TRANSDUCERS; SURFACE ACOUSTIC WAVE DELAY LINE;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0038608182     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.1594     Document Type: Article

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