Vacuum sealed ultra miniature fiber-optic pressure sensor using white light interferometry

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 931-934

  Totsu, K ^a   Haga, Y ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Bonding; Chromium; Fabry Perot interferometers; Fluctuations; Light sources; Optical fiber sensors; Optical fibers; Optical interferometry; Optical noise; Temperature sensors

Indexed keywords

ACTUATORS; BONDING; CHROMIUM; FABRY-PEROT INTERFEROMETERS; FIBER OPTIC SENSORS; FIBER OPTICS; FIBERS; INTERFEROMETERS; INTERFEROMETRY; LIGHT SOURCES; MICROSYSTEMS; OPTICAL FIBERS; PRESSURE SENSORS; SOLID-STATE SENSORS; TEMPERATURE SENSORS; TRANSDUCERS;

FABRY-PEROT CAVITY; FLUCTUATIONS; OPTICAL INTERFEROMETRY; OPTICAL NOISE; SENSING ELEMENTS; TEMPERATURE CHANGES; ULTRA-MINIATURE FIBER-OPTIC PRESSURE SENSORS; WHITE-LIGHT INTERFEROMETRY;

FIBER BONDING;

EID: 84893992070     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215628     Document Type: Conference Paper

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